To form deeper hole arrays in the silicon, selleck inhibitor etching time was prolonged from 30 s to 1 min. The depth of the silicon nanohole arrays increased with increasing etching time. In the case of chemical etching for 1 min, the depth and aspect ratio of the silicon holes were approximately www.selleckchem.com/products/lazertinib-yh25448-gns-1480.html 1.2 μm and approximately 30, respectively (Figure 5c). The depth increased by almost twice the depth of the hole arrays is shown in Figure 5b. To examine the effect of catalyst species on the morphology

of etched silicon structures, chemical etching was also carried out using patterned Au nanodot arrays formed by a similar displacement plating. When the composition of the plating solution was changed

from AgNO3/HF to Na[AuCl4] · 2H2O/HF, highly ordered Au nanodot arrays were also obtained on the silicon substrate, as shown in Figure 6a. Each dot appears to consist of two or three particles with average sizes of 20 to 40 nm. The morphology of the dots was quite similar to that of the copper dots deposited by electroless deposition in our previous work [26]. Figure 6 SEM images of Si nanohole arrays fabricated by Au-assisted chemical etching. (a) SEM image of Au nanodot Protein Tyrosine Kinase arrays formed on Si substrate through anodic porous alumina mask. (b) Top and (c) cross-sectional SEM images of Si nanohole arrays fabricated by Au-assisted chemical etching in 5 mol dm-3 HF – 1 mol dm-3 H2O2 solution for 1 min. Figure 6b shows a SEM image of the etched silicon surface using the patterned Au catalyst. The surface morphology of the etched silicon was different from that of the hole arrays formed using the Ag catalyst, as shown in Figure 5. The notable features of the nanoholes formed using the Au catalyst are that the opening of holes was wider and rough around the edges at the upper part. In addition, the etching

rate using the Au catalyst was significantly lower than that in the case of using the Ag catalyst even under the same etching conditions, as shown in Figure 5c. When the etching time was equal to 1 min, the depth and aspect ratio of the silicon holes were approximately 200 nm and approximately 5, respectively (Figure 6c). Amobarbital That is, the etching rate was six times lower for the Au catalyst than for the Ag catalyst. The reason for the difference in etching rate might be the difference in the catalytic activity of the noble metal and in the morphology of the catalyst [9, 13]. Although the depth of the holes was basically determined by etching time, prolonged chemical etching in 5 mol dm-3 HF – 1 mol dm-3 H2O2 using the Au catalyst caused the formation of a tapered hole structure due to the chemical dissolution of the horizontal plane at the outermost surface by the diffusion of positive holes (h+).